Chemistry of Atomic Layer Deposition - Sean Thomas Barry - Books - De Gruyter - 9783110712513 - November 22, 2021
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Chemistry of Atomic Layer Deposition

Sean Thomas Barry

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Chemistry of Atomic Layer Deposition

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 22, 2021
ISBN13 9783110712513
Publishers De Gruyter
Pages 113
Dimensions 170 × 240 × 6 mm   ·   195 g
Language English  

See all of Sean Thomas Barry ( e.g. Paperback Book )