Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology - A.j. Van Roosmalen - Books - Springer-Verlag New York Inc. - 9781489925688 - May 29, 2013
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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology Softcover reprint of the original 1st ed. 1991 edition

A.j. Van Roosmalen

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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology Softcover reprint of the original 1st ed. 1991 edition

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

256 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released May 29, 2013
ISBN13 9781489925688
Publishers Springer-Verlag New York Inc.
Pages 237
Dimensions 178 × 254 × 13 mm   ·   449 g

See all of A.j. Van Roosmalen ( e.g. Hardcover Book and Paperback Book )