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The Physics of Submicron Lithography - Microdevices Softcover reprint of the original 1st ed. 1992 edition
Kamil A. Valiev
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The Physics of Submicron Lithography - Microdevices Softcover reprint of the original 1st ed. 1992 edition
Kamil A. Valiev
In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.
493 pages, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | September 27, 2012 |
| ISBN13 | 9781461364610 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 493 |
| Dimensions | 178 × 254 × 26 mm · 870 g |
| Language | English |
See all of Kamil A. Valiev ( e.g. Hardcover Book and Paperback Book )