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Microlithography: Science and Technology 3rd edition
Bruce W. Smith
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Microlithography: Science and Technology 3rd edition
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | May 20, 2020 |
| ISBN13 | 9781439876756 |
| Publishers | Taylor & Francis Inc |
| Pages | 838 |
| Dimensions | 1.65 kg |
| Language | English |
| Editor | Smith, Bruce W. |
| Editor | Suzuki, Kazuaki |
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