Silicon-on-Insulator Technology: Materials to VLSI - J.-P. Colinge - Books - Springer - 9780792380078 - September 30, 1997
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Silicon-on-Insulator Technology: Materials to VLSI 2nd ed. 1997 edition

J.-P. Colinge

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Silicon-on-Insulator Technology: Materials to VLSI 2nd ed. 1997 edition

Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition describes the different facets of SOI technology. SOI fabrication and characterization techniques, SOI device processing, the physics of the SOI MOSFET as well as that of SOI other devices, and the performances of SOI circuits are discussed in detail.


272 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 30, 1997
ISBN13 9780792380078
Publishers Springer
Pages 272
Dimensions 156 × 234 × 17 mm   ·   589 g
Language English  

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