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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
Media | Books Paperback Book (Book with soft cover and glued back) |
Released | November 16, 2007 |
ISBN13 | 9780470727300 |
Publishers | John Wiley & Sons Inc |
Pages | 544 |
Dimensions | 247 × 174 × 29 mm · 916 g |
Language | English |
See all of Mack, Chris (Lithoguru.com) ( e.g. Paperback Book and Hardcover Book )