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Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology 2005 edition
Nava Setter
Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology 2005 edition
Nava Setter
Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.
414 pages, biography
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | March 3, 2005 |
ISBN13 | 9780387233109 |
Publishers | Springer-Verlag New York Inc. |
Pages | 414 |
Dimensions | 155 × 235 × 23 mm · 839 g |
Editor | Setter, Nava |
See all of Nava Setter ( e.g. Hardcover Book and Paperback Book )