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Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
462 pages, 25 black & white illustrations, 25 colour illustrations, 20 black & white tables, biograp
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | December 21, 2009 |
Original release date | 2008 |
ISBN13 | 9780387095103 |
Publishers | Springer-Verlag New York Inc. |
Pages | 444 |
Dimensions | 241 × 166 × 33 mm · 771 g |
Language | English |
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