Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology - A.j. Van Roosmalen - Books - Springer Science+Business Media - 9780306438356 - March 31, 1991
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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology 1991 edition

A.j. Van Roosmalen

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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology 1991 edition

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

254 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 31, 1991
ISBN13 9780306438356
Publishers Springer Science+Business Media
Pages 237
Dimensions 178 × 254 × 19 mm   ·   666 g
Language English  

See all of A.j. Van Roosmalen ( e.g. Hardcover Book and Paperback Book )