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The Physics of Microfabrication 1982 edition
Ivor Brodie
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The Physics of Microfabrication 1982 edition
Ivor Brodie
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years.
504 pages, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | May 31, 1982 |
| ISBN13 | 9780306408632 |
| Publishers | Springer Science+Business Media |
| Pages | 504 |
| Dimensions | 156 × 234 × 30 mm · 911 g |
| Language | English |
![Cover for Ivor Brodie · The Physics of Micro / Nano-Fabrication - Microdevices (Paperback Book) [1st ed. Softcover of orig. ed. 1993 edition] (2010)](https://imusic.b-cdn.net/images/item/original/211/9781441932211.jpg?ivor-brodie-2010-the-physics-of-micro-nano-fabrication-microdevices-paperback-book&class=scaled&v=1603986046)
![Cover for Ivor Brodie · The Physics of Micro / Nano-Fabrication - Microdevices (Hardcover Book) [2 Revised edition] (1993)](https://imusic.b-cdn.net/images/item/original/462/9780306441462.jpg?ivor-brodie-1993-the-physics-of-micro-nano-fabrication-microdevices-hardcover-book&class=scaled&v=1408566650)